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Surface Acoustic Wave Velocity

January 1, 2006

Surface acoustic wave velocity in Single-Crystal AlN substrates - Bu, Ciplys, Shur, Schowalter, Schujman and Gaska - UFFC 53, p251, 2006.

The surface acoustic wave velocity has been measured on a-plane (c-propagation) and c-plane oriented bulk aluminum nitride (AlN) single crystals using the S11-parameter method in the frequency range 160–360 MHz.

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