Surface Acoustic Wave Velocity
January 01, 2006
Surface acoustic wave velocity in Single-Crystal AlN substrates - Bu, Ciplys, Shur, Schowalter, Schujman and Gaska - UFFC 53, p251, 2006.
The surface acoustic wave velocity has been measured on a-plane (c-propagation) and c-plane oriented bulk aluminum nitride (AlN) single crystals using the S11-parameter method in the frequency range 160–360 MHz.